Studies of the relationship between megasonics, surface etching, and particle removal in SC-1 solutions
- S.L. Cohen
- D.L. Rath
- et al.
- 1995
- MRS Spring Meeting 1995
Publications
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49 results for Michael Liehr
Physically unclonable cryptographic primitives using self-Assembled carbon nanotubes
- Zhaoying Hu
- Jose Miguel M. Lobez Comeras
- et al.
- 2016
- Nature Nanotechnology
Defect microchemistry at the SiO2/Si interface
- G.W. Rubloff
- K. Hofmann
- et al.
- 1987
- Physical Review Letters
Observation of long-wavelength interface phonons in a GaAs/AlGaAs superlattice
- Ph. Lambin
- J.P. Vigneron
- et al.
- 1986
- Physical Review Letters
Correlation of Schottky-barrier height and microstructure in the epitaxial Ni silicide on Si(111)
- M. Liehr
- P.E. Schmid
- et al.
- 1985
- Physical Review Letters
Product burn-in stress impacts on SRAM array performance
- Li Wang
- Qiuyi Ye
- et al.
- 2007
- IRPS 2007
Nucleation and growth of silicon on Si02 during SiH4 low pressure chemical vapor deposition as studied by hydrogen desorption titration
- M. Liehr
- S.S. Dana
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Preoxidation Si cleaning and its impact on metal oxide semiconductor characteristics
- S.R. Kasi
- M. Liehr
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface analysis studies of copper chemical vapor deposition from 1,5-cyclooctadiene-copper(l)-hexafluoroacetylacetonate
- Susan L. Cohen
- Michael Liehr
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reactivity of a fluorine passivated silicon surface
- Ruud A. Haring
- Michael Liehr
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films