Mitigating residual stress in Cu metallization
- Conal E. Murray
- Jean Jordan-Sweet
- et al.
- 2012
- Applied Physics Letters
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105 results for Michael F. Toney
Understanding stress gradients in microelectronic metallization
- Conal E. Murray
- E. Todd Ryan
- et al.
- 2012
- Powder Diffraction
Evolution of stress gradients in Cu films and features induced by capping layers
- Conal E. Murray
- E.T. Ryan
- et al.
- 2012
- Microelectronic Engineering
In situ evolution of stress gradients in Cu films induced by capping layers
- Conal E. Murray
- Paul R. Besser
- et al.
- 2010
- Applied Physics Letters
Structural properties of epitaxial SrHfO3 thin films on Si (001)
- Monica Sawkar-Mathur
- Chiara Marchiori
- et al.
- 2010
- Thin Solid Films
The role of OTS density on pentacene and C60 nucleation, thin film growth, and transistor performance
- Ajay Virkar
- Stefan Mannsfeld
- et al.
- 2009
- Advanced Functional Materials
Ferromagnetism and structure of epitaxial Cr-doped anatase TiO2 thin films
- T.C. Kaspar
- T. Droubay
- et al.
- 2006
- Physical Review B - CMMP
Microstructural origin of orientation ratio in magnetic recording media
- Michael F. Toney
- Ernesto E. Marinero
- et al.
- 2006
- Journal of Applied Physics
Agglomeration and sintering in annealed FePt nanoparticle assemblies studied by small angle neutron scattering and x-ray diffraction
- T. Thomson
- S.L. Lee
- et al.
- 2005
- Physical Review B - CMMP
On the relationship of magnetocrystalline anisotropy and stoichiometry in epitaxial L1 0 CoPt (001) and FePt (001) thin films
- K. Barmak
- J. Kim
- et al.
- 2005
- Journal of Applied Physics