The merits of high landing energy for E-beam inspection
- Oliver D. Patterson
- Richard Hafer
- et al.
- 2015
- ASMC 2015
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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12 results for Oliver D. Patterson
E-beam inspection throughput acceleration via Targeted Critical Area Inspection
- Oliver D. Patterson
- Rasit O Topaloglu
- et al.
- 2015
- ASMC 2015
Early detection of electrical defects in deep trench capacitors using voltage contrast inspection
- Brian Donovan
- Oliver D. Patterson
- et al.
- 2013
- ASMC 2013
Early detection of systematic patterning problems for a 22nm SOI technology using E-beam hot spot inspection
- Oliver D. Patterson
- Deborah A. Ryan
- et al.
- 2013
- ASMC 2013
E-beam inspection for detection of sub-design rule physical defects
- Oliver D. Patterson
- Julie Lee
- et al.
- 2012
- ASMC 2012
Automated SEM Offset using programmed defects
- Oliver D. Patterson
- Andrew Stamper
- et al.
- 2011
- ASMC 2011
Methodology for trench capacitor etch optimization using voltage contrast inspection and special processing
- Oliver D. Patterson
- Xing J. Zhou
- et al.
- 2010
- ASMC 2010
Voltage contrast test structure for measurement of mask misalignment
- Oliver D. Patterson
- Roland Hahn
- et al.
- 2010
- ASMC 2010
Characterization of contact module failure mechanisms for SOI technology using E-beam inspection and in-line TEM
- Xing J. Zhou
- Oliver D. Patterson
- et al.
- 2010
- ASMC 2010
Application of E-beam hot spot inspection for early detection of systematic patterning problems to a FinFET technology
- Deborah A. Ryan
- Oliver D. Patterson
- et al.
- 2015
- J. Micro/Nanolithogr. MEMS MOEMS