Massively-parallel FDTD simulations to address mask electromagnetic effects in Hyper-NA immersion lithography
- Jaione Tirapu Azpiroz
- Geoffrey W. Burr
- et al.
- 2008
- SPIE Advanced Lithography 2008
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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173 results for Geoffrey W. Burr
Novel lithography-independent pore phase change memory
- M. Breitwisch
- T. Nirschl
- et al.
- 2007
- VLSI Technology 2007
Enhanced electro-optic tuning in lithium niobate photonic crystals: The role of slow light
- Maria-Pilar Bernal
- Matthieu Roussey
- et al.
- 2007
- CLEO 2007
Enhanced electro-optic tuning in lithium niobate photonic crystals: The role of slow light
- Maria-Pilar Bernal
- Matthieu Roussey
- et al.
- 2007
- CLEO/Europe 2007
Novel one-mask self-heating pillar phase change memory
- T.D. Happ
- M. Breitwisch
- et al.
- 2006
- VLSI Technology 2006
Improving accuracy by sub-pixel smoothing in FDTD
- A. Farjadpour
- David Roundy
- et al.
- 2006
- SPIE Optics + Photonics 2006
Developments in FDTD as applied to photonics
- Geoffrey W. Burr
- 2006
- IPRA 2006
Balancing accuracy against computation time: 3-D FDTD for nanophotonics device optimization
- Geoffrey W. Burr
- Ardavan Farjadpour
- 2005
- SPIE IOPTO 2005
Photonic crystal microcavities as ultracompact film-thickness monitors for biosensing
- Geoffrey W. Burr
- Edmond Chow
- et al.
- 2005
- NPIS 2005
Holographic content-addressable data storage
- Geoffrey W. Burr
- 2004
- LEOS 2004