0.026μm2 high performance Embedded DRAM in 22nm technology for server and SOC applications
- C. Pei
- G. Wang
- et al.
- 2014
- IEDM 2014
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4 results for N. Arnold
22nm High-performance SOI technology featuring dual-embedded stressors, Epi-Plate High-K deep-trench embedded DRAM and self-aligned Via 15LM BEOL
- S. Narasimha
- P. Chang
- et al.
- 2012
- IEDM 2012
Process Challenge in Analog Computing Hardware using Phase Change Memory (PCM)
- Victor Chan
- I. Ok
- et al.
- 2023
- ASMC 2023
Early detection of electrical defects in deep trench capacitors using voltage contrast inspection
- Brian Donovan
- Oliver D. Patterson
- et al.
- 2013
- ASMC 2013