Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

Date

Start

End

Featured collections

Popular topics

108 results for Sebastian Engelmann

Pattern transfer of directed self-assembly patterns for CMOS device applications
- - Hsin-Yu Tsai
  - Hiroyuki Miyazoe
  - et al.
- 2013
- J. Micro/Nanolithogr. MEMS MOEMS
The effects of vacuum ultraviolet radiation on low-k dielectric films
- - H. Sinha
  - H. Ren
  - et al.
- 2012
- Journal of Applied Physics
Sub-30 nm pitch line-space patterning of semiconductor and dielectric materials using directed self-assembly
- - Hsin-Yu Tsai
  - Hiroyuki Miyazoe
  - et al.
- 2012
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Characterization and mechanism of He plasma pretreatment of nanoscale polymer masks for improved pattern transfer fidelity
- - Florian Weilnboeck
  - D. Metzler
  - et al.
- 2011
- Applied Physics Letters
Reflectance and substrate currents of dielectric layers under vacuum ultraviolet irradiation
- - H. Sinha
  - D.B. Straight
  - et al.
- 2010
- JVSTA
Hydrogen silsesquioxane-based hybrid electron beam and optical lithography for high density circuit prototyping
- - M. Guillorn
  - J. Chang
  - et al.
- 2009
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Dependence of polymer surface roughening rate on deposited energy density during plasma processing
- - Sebastian Engelmann
  - Robert L. Bruce
  - et al.
- 2009
- Plasma Processes and Polymers
Dependence of photoresist surface modifications during plasma-based pattern transfer on choice of feedgas composition: Comparison of C₄ F ₈ - And CF₄ -based discharges
- - S. Engelmann
  - R. Bruce
  - et al.
- 2009
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics