High throughput lithography using thermal scanning probes
- Colin D. Rawlings
- Martin Spieser
- et al.
- 2017
- TRANSDUCERS 2017
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85 results for Armin Knoll
PVD prepared molecular glass resists for scanning probe lithography
- Christian Neuber
- Hans-Werner Schmidt
- et al.
- 2016
- SPIE Advanced Lithography 2016
Thermal probe nanolithography for novel photonic devices
- Felix Holzner
- Philip Paul
- et al.
- 2015
- IPRSN 2015
Precision positioning for thermal scanning probe lithography
- Philip Paul
- Simon Züst
- et al.
- 2015
- EUSPEN 2015
Tailored molecular glass resists for scanning probe lithography
- Christian Neuber
- Hans-Werner Schmidt
- et al.
- 2015
- SPIE Advanced Lithography 2015
Nanometer control of the markerless overlay process using thermal scanning probe lithography
- Colin Rawlings
- Urs Duerig
- et al.
- 2014
- AIM 2014
Closed-loop high-speed 3D thermal probe nanolithography
- Armin W. Knoll
- Michal Zientek
- et al.
- 2014
- SPIE Advanced Lithography 2014
Molecular glass resists for scanning probe lithography
- Christian Neuber
- Andreas Ringk
- et al.
- 2014
- SPIE Advanced Lithography 2014
Thermal probe nanolithography: In-situ inspection, high-speed, high-resolution, 3D
- Felix Holzner
- Philip Paul
- et al.
- 2013
- EMLC 2013
NEM switch technologies for low-power logic applications
- Daniel Grogg
- Yu Pu
- et al.
- 2012
- SENSORS 2012