Retardation of arsenic diffusion in silicon-germanium by co-implantation
- Omer Dokumaci
- Paul Ronsheim
- et al.
- 2004
- ECS Meeting 2004
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35 results for Dureseti Chidambarrao
Moisture and oxygen uptake in Low K/ copper interconnect structures
- T.M. Shaw
- D. Jimerson
- et al.
- 2003
- ADMETA 2003
Super-halo asymmetric vertical pass transistor design for ultra-dense DRAM technologies
- D. Chidambarrao
- K. McStay
- et al.
- 2003
- VLSI-TSA 2003
On the retention time distribution of dual-channel vertical DRAM technologies
- J. Beintner
- Y. Li
- et al.
- 2003
- VLSI-TSA 2003
Backside sputter depth profiling of phosphorus diffusion from a polysilicon source
- P.A. Ronsheim
- D. Chidambarrao
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Numerical simulation of the X-ray stress analysis technique in polycrystalline materials under elastic loading
- D. Chidambarrao
- Y.C. Song
- et al.
- 1997
- Metallurgical and Materials Transactions A: Physical Metallurgy and Materials Science
IBM z15: Physical design improvements to significantly increase content in the same technology
- Christopher Berry
- David Wolpert
- et al.
- 2020
- IBM J. Res. Dev
Study of silicon strain in shallow trench isolation
- M. Belyansky
- N. Klymko
- et al.
- 2010
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Controlled nucleation of dislocations by a spatially localized stress field
- M. Kammler
- D. Chidambarrao
- et al.
- 2005
- Applied Physics Letters
Dislocation modeling for the microelectronics industry
- K.W. Schwarz
- D. Chidambarrao
- 2005
- Materials Science and Engineering: A