Control of surface oxide formation in plasma-enhanced quasiatomic layer etching of tantalum nitride
- Nathan Marchack
- Jon L. Innocent-Dolor
- et al.
- 2020
- JVSTA
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.