Hot Electron Emission Lithography: A method for efficient large area e-beam projection
- M. Poppeller
- E. Cartier
- et al.
- 1999
- Microelectronic Engineering
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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182 results for Eduard Cartier
Hot electron emission lithography
- M. Poppeller
- E. Cartier
- et al.
- 1998
- Applied Physics Letters
Atomic-scale studies of electron transport through MOS structures
- H.J. Wen
- R. Ludeke
- et al.
- 1998
- Applied Surface Science
Interface state capture cross section measurements on vacuum annealed and radiation damaged Si:SiO2 surfaces
- M.J. Uren
- V. Nayar
- et al.
- 1998
- JES
Characterization of the hot-electron-induced degradation in thin SiO2 gate oxides
- E. Cartier
- 1998
- Microelectronics Reliability
Potential fluctuations due to Pb centres at the Si/SiO2 interface
- M.J. Uren
- K.M. Brunson
- et al.
- 1997
- Microelectronic Engineering
On the relationship between stress induced leakage currents and catastrophic breakdown in ultra-thin SiO2 based dielectrics
- D.A. Buchanan
- J.H. Stathis
- et al.
- 1997
- Microelectronic Engineering
Light emission during direct and Fowler-Nordheim tunneling in ultra thin MOS tunnel junctions
- E. Cartier
- J.C. Tsang
- et al.
- 1997
- Microelectronic Engineering
Conductance measurements on Pb centers at the (111) Si:SiO2 interface
- M.J. Uren
- J.H. Stathis
- et al.
- 1996
- Journal of Applied Physics
Hot-electron induced passivation of silicon dangling bonds at the Si(111)/SiO2 interface
- E. Cartier
- J.H. Stathis
- 1996
- Applied Physics Letters