Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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76 results for Eric A. Joseph

Resistivity of copper interconnects at 28 nm pitch and copper cross-sectional area below 100 nm²
- - Adam Pyzyna
  - Hsinyu Tsai
  - et al.
- 2017
- IITC 2017
Evaluation of ALE processes for patterning
- - J. M. Papalia
  - Nathan Marchack
  - et al.
- 2016
- SPIE Advanced Lithography 2016
High chi block copolymer DSA to improve pattern quality for FinFET device fabrication
- - Hsinyu Tsai
  - Hiroyuki Miyazoe
  - et al.
- 2016
- SPIE Advanced Lithography 2016
Resistivity of copper interconnects beyond the 7 nm node
- - Adam Pyzyna
  - Robert L. Bruce
  - et al.
- 2015
- VLSI Technology 2015
Moving from thin films to atomic layers - Atomic layer etching
- - Craig Huffman
  - Eric A. Joseph
  - et al.
- 2015
- VLSI-TSA 2015
Self-aligned line-space pattern customization with directed self-assembly graphoepitaxy at 24nm pitch
- - Hsinyu Tsai
  - Hiroyuki Miyazoe
  - et al.
- 2015
- SPIE Advanced Lithography 2015
Subtractive W contact and local interconnect co-integration (CLIC)
- - Fei Liu
  - Benjamin Fletcher
  - et al.
- 2013
- IITC 2013
A scalable volume-confined phase change memory using physical vapor deposition
- - S.C. Lai
  - S. Kim
  - et al.
- 2013
- VLSI Technology 2013
Recovery dynamics and fast (sub-50ns) read operation with Access Devices for 3D crosspoint memory based on mixed-ionic-electronic-conduction (MIEC)
- - G.W. Burr
  - K. Virwani
  - et al.
- 2013
- VLSI Technology 2013
Advanced plasma etch for the 10nm node and beyond
- - Eric Joseph
  - Sebastian Engelmann
  - et al.
- 2013
- SPIE Advanced Lithography 2013