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Gloria Fraczak- Wanki Kim
- Matthew BrightSky
- et al.
- 2016
- IEDM 2016
- Wanki Kim
- Robert L. Bruce
- et al.
- 2019
- VLSI Technology 2019
- Robert L. Bruce
- Gloria Fraczak
- et al.
- 2017
- SPIE Advanced Lithography 2017
- G.W. Burr
- K. Virwani
- et al.
- 2013
- VLSI Technology 2013
- Damon B. Farmer
- Matthew Copel
- et al.
- 2021
- Chemistry of Materials