The use of in situ X-ray diffraction, optical scattering and resistance analysis techniques for evaluation of copper diffusion barriers in blanket films and damascene structures
- C. Cabral Jr.
- C. Lavoie
- et al.
- 2001
- Thin Solid Films
Publications
156 results for Jean L. Jordan-Sweet
Scanning x-ray microtopographs of misfit dislocations at SiGe/Si interfaces
- P.M. Mooney
- J.L. Jordan-Sweet
- et al.
- 2001
- Applied Physics Letters
Divergence effects in monochromatic x-ray microdiffraction using tapered capillary optics
- I.C. Noyan
- P.-C. Wang
- et al.
- 2000
- Review of Scientific Instruments
Images of local tilted regions in strain-relaxed SiGe layers
- P.M. Mooney
- J.L. Jordan-Sweet
- et al.
- 1999
- Physica B: Condensed Matter
Observation of local tilted regions in strain-relaxed SiGe/Si buffer layers using x-ray microdiffraction
- P.M. Mooney
- J.L. Jordan-Sweet
- et al.
- 1999
- Applied Physics Letters
Interdiffusion studies of single crystal TiN/NbN superlattice thin films
- C. Engström
- J. Birch
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
In situ characterization of titanium silicide formation: The effect of Mo interlayer, temperature ramp-rate, and annealing atmosphere
- S.-L. Zhang
- C. Lavoie
- et al.
- 1999
- Journal of Applied Physics
A cost-effective method for minimizing the sphere-of-confusion error of x-ray microdiffractometers
- I.C. Noyan
- S. Kaldor
- et al.
- 1999
- Review of Scientific Instruments
Characterization of substrate/thin-film interfaces with x-ray microdiffraction
- I.C. Noyan
- J.L. Jordan-Sweet
- et al.
- 1998
- Applied Physics Letters
X-ray diffraction analysis of SiGe/Si heterostructures on sapphire substrates
- P.M. Mooney
- J.A. Ott
- et al.
- 1998
- Applied Physics Letters