Thin-film transformations and volatile products in the formation of nanoporous low- k polymethylsilsesquioxane-based dielectric
- P. Lazzeri
- L. Vanzetti
- et al.
- 2005
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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390 results for Robert Miller
Templating organosilicate vitrification using unimolecular self-organizing polymers: Evolution of morphology and nanoporosity development with network formation
- Teddie Magbitang
- Victor Y. Lee
- et al.
- 2005
- Advanced Materials
Phase separation behavior of poly(methyl methacrylate-co-dimethylaminoethyl methacrylate)/methyl silsesquioxane hybrid nanocomposites studied by dansyl fluorescence
- Q.R. Huang
- Curtis W. Frank
- et al.
- 2005
- Chemistry of Materials
Successful dual damascene integration of extreme low k materials (k < 2.0) using a novel gap fill based integration scheme
- S.V. Nitta
- S. Purushothaman
- et al.
- 2004
- IEDM 2004
Supercritical CO2 extraction of porogen phase: An alternative route to nanoporous dielectrics
- J.A. Lubguban
- S. Gangopadhyay
- et al.
- 2004
- Journal of Materials Research
Nanoporous thin films with hydrophilicity-contrasted patterns
- Ho-Cheol Kim
- Cortney R. Kreller
- et al.
- 2004
- Chemistry of Materials
Templating organosilicate vitrification using unimolecular self-organizing polymers prepared from tandem ring opening and atom transfer radical polymerizations
- T. Magbitang
- V.Y. Lee
- et al.
- 2004
- Macromolecular Symposia
Polysilanes—a new look at some old materials
- Robert D. Miller
- 2004
- Advanced Materials
Polysilanes: Photochemistry and deep UV lithography
- R.D. Miller
- G.M. Wallraff
- et al.
- 2004
- Polymer Engineering & Science
Design of a positive resist for projection lithography in the mid‐UV
- Grant Willson
- Robert Miller
- et al.
- 2004
- Polymer Engineering & Science