Mechanical enhancement of low- k organosilicates by laser spike annealing
- Willi Volksen
- Geraud Dubois
- et al.
- 2008
- JES
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48 results for E. Simonyi
Glow discharge preparation of amorphous hydrogenated silicon from higher silanes
- B.A. Scott
- M.H. Brodsky
- et al.
- 2008
- Applied Physics Letters
Low dielectric constant nanocomposite thin films based on silica nanoparticle and organic thermosets
- Qinghuang Lin
- Stephen A. Cohen
- et al.
- 2007
- Journal of Polymer Science, Part B: Polymer Physics
Delamination in patterned films
- X.-H. Liu
- M.W. Lane
- et al.
- 2007
- Int. J. Solids Struct.
Moisture-driven crack growth in blanket low dielectric constant and ultralow dielectric constant films
- E. Liniger
- E. Simonyi
- 2004
- Journal of Applied Physics
Processing dependent thermal conductivity of nanoporous silica xerogel films
- Anurag Jain
- Svetlana Rogojevic
- et al.
- 2002
- Journal of Applied Physics
Effects of processing history on the modulus of silica xerogel films
- Anurag Jain
- Svetlana Rogojevic
- et al.
- 2001
- Journal of Applied Physics
Porous silica materials as low-k dielectrics for electronic and optical interconnects
- A. Jain
- S. Rogojevic
- et al.
- 2001
- Thin Solid Films
Opportunities and challenges in ultra low k dielectrics for interconnect applications
- S. Purushothaman
- S.V. Nitta
- et al.
- 2001
- Technical Digest-International Electron Devices Meeting
Ta and TaN adhesion to high-temperature fluorinated polyimides. Surface and interface chemistry
- K.-W. Lee
- E. Simonyi
- et al.
- 1998
- Journal of Adhesion Science and Technology