TiN surface dynamics: Role of surface and bulk mass transport processes
- J. Bareño
- S. Kodambaka
- et al.
- 2006
- Advanced Summer School in Physics 2006
Publications
Date
Featured collections
Popular topics
12 results for J. E. Greene
Preface for the Festschrift Honoring Dr. Steve Rossnagel
- Ivan Petrov
- J. E. Greene
- et al.
- 2020
- JVSTA
Sn-mediated Ge/Ge(001) growth by low-temperature molecular-beam epitaxy: Surface smoothening and enhanced epitaxial thickness
- K.A. Bratland
- Y.L. Foo
- et al.
- 2005
- Journal of Applied Physics
Interfacial reaction pathways and kinetics during annealing of 111-textured Al/TiN bilayers: A synchrotron x-ray diffraction and transmission electron microscopy study
- J.-S. Chun
- P. Desjardins
- et al.
- 2001
- Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Interfacial reaction pathways and kinetics during annealing of epitaxial Al/TiN(001) model diffusion barrier systems
- J.-S. Chun
- P. Desjardins
- et al.
- 2001
- Thin Solid Films
Interfacial reactions in epitaxial Al/TiN(111) model diffusion barriers: Formation of an impervious self-limited wurtzite-structure AIN(0001) blocking layer
- J.-S. Chun
- P. Desjardins
- et al.
- 2001
- Journal of Applied Physics
Synchrotron x-ray diffraction and transmission electron microscopy studies of interfacial reaction paths and kinetics during annealing of fully-002-textured Al/TiN bilayers
- J.-S. Chun
- J.R.A. Carlsson
- et al.
- 2001
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Development of 111 texture in Al films grown on SiO2/Si(001) by ultrahigh-vacuum primary-ion deposition
- Y.W. Kim
- I. Petrov
- et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Directed sputter deposition of AlCu: Film microstructure and microchemistry
- S.M. Rossnagel
- J. Moser
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Influence of ion bombardment on the interaction of Sb with the Si(100) surface
- S.A. Barnett
- H.F. Winters
- et al.
- 1987
- Surface Science