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Phil Brock- Thomas I. Wallow
- P.J. Brock
- et al.
- 1999
- SPIE Advances in Resist Technology and Processing 1999
- W.D. Hinsberg
- F.A. Houle
- et al.
- 1999
- J. Photopolym. Sci. Tech.
- L.D. Bozano
- S.E. Tuttle
- et al.
- 1998
- Applied Physics Letters
- Thomas I. Wallow
- Phillip J. Brock
- et al.
- 1998
- Microlithography 1998
- J.C. Scott
- George G. Malliaras
- et al.
- 1998
- SPIE Optical Science, Engineering, and Instrumentation 1998
- Thomas I. Wallow
- Robert D. Allen
- et al.
- 1998
- Microlithography 1998
- George G. Malliaras
- J.R. Salem
- et al.
- 1998
- Physical Review B - CMMP
- George G. Malliaras
- J.R. Salem
- et al.
- 1998
- Journal of Applied Physics
- Robert D. Allen
- Thomas I. Wallow
- et al.
- 1998
- J. Photopolym. Sci. Tech.
- S.A. Carter
- J.C. Scott
- et al.
- 1997
- Applied Physics Letters