Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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18 results for R. Mann

Silicide formation in Ti-Si and Co-Si reactions
- - L. Clevenger
  - Q.Z. Hong
  - et al.
- 1993
- MRS Proceedings 1993
Low temperature formation of C54-TiSi₂ using titanium alloys
- - C. Cabral Jr.
  - L. Clevenger
  - et al.
- 1997
- Applied Physics Letters
Lowering the formation temperature of the C54-TiSi₂ phase using a metallic interfacial layer
- - C. Cabral Jr.
  - L. Clevenger
  - et al.
- 1997
- Journal of Materials Research
Reduction of the C54-TiSi₂ phase transformation temperature using refractory metal ion implantation
- - R. Mann
  - G.L. Miles
  - et al.
- 1995
- Applied Physics Letters
Study of C49-TiSi₂ and C54-TiSi₂ formation on doped polycrystalline silicon using in situ resistance measurements during annealing
- - L. Clevenger
  - R. Mann
  - et al.
- 1994
- Journal of Applied Physics
The C49 to C54 Phase Transformation in TiSi²Thin Films
- - L. Clevenger
  - R. Mann
- 1994
- JES
The C49 to C54-TiSi₂ transformation in self-aligned silicide applications
- - R. Mann
  - L. Clevenger
  - et al.
- 1993
- Journal of Applied Physics
Kinetic analysis of C49-TiSi₂ and C54-TiSi₂ formation at rapid thermal annealing rates
- - L. Clevenger
  - J.M.E. Harper
  - et al.
- 1992
- Journal of Applied Physics