Publications

3 results for Michael T. Postek

Review of current progress in nanometrology with the helium ion microscope
- - Michael T. Postek
  - András Vladár
  - et al.
- 2010
- Measurement Science and Technology
Application of the low-loss scanning electron microscope image to integrated circuit technology part II - Chemically-mechanically planarized samples
- - Oliver C. Wells
  - Maurice McGlashan-Powell
  - et al.
- 2001
- Scanning
Studies of samples having shallow surface topography by the low-loss electron (LLE) method in the scanning electron microscope (SEM)
- - O.C. Wells
  - Maurice McGlashen-Powell
  - et al.
- 2000
- Scanning