Sub-20 nm abrupt USJ formation with long ms-flash with sub-2 nm dopant motion control
- Kam-Leung Lee
- Isaac Lauer
- et al.
- 2010
- IWJT 2010
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15 results for Kam-Leung Lee
Modeling of the diffusion of implanted boron in strained Si/Si1-xGex
- Huilong Zhu
- Kam-Leung Lee
- et al.
- 2002
- SISPAD 2002
Carbon implanted halo for super halo characteristic NFETs in bulk and SOI
- John Ellis-Monaghan
- Kam-Leung Lee
- et al.
- 2001
- ESSDERC 2001
New polysilicon disposable sidewall process for sub-50 nm CMOS
- K.L. Lee
- D. Boyd
- et al.
- 2001
- ESSDERC 2001
Impact of diffusionless anneal using dynamic surface anneal on the electrical properties of a high-k/metal gate stack in metal-oxide-semiconductor devices
- Changhwan Choi
- Kam-Leung Lee
- et al.
- 2011
- Applied Physics Letters