Summary Abstract: Non-bulk-like physical properties of thin films due to ion bombardment during film growth
- Eric Kay
- 1986
- JVSTA
Publications
89 results for Eric Kay
Microstructure and electrical conductivity of plasma deposited gold/fluorocarbon composite filmsa)
- J. Perrin
- B. Despax
- et al.
- 1986
- JVSTA
Plasma potentials of 13.56-MHz rf argon glow discharges in a planar system
- K. Köhler
- J.W. Coburn
- et al.
- 1985
- Journal of Applied Physics
Interpretation of the nonbulklike optical density of thin copper films grown under ion bombardment
- F. Parmigiani
- E. Kay
- et al.
- 1985
- Applied Optics
EXAMPLES OF ION BOMBARDMENT EFFECTS ON FILM GROWTH AND EROSION PROCESSES - PLASMA AND BEAM EXPERIMENTS.
- E. Kay
- 1985
- NATO Advanced Study Institute 1985
Optical properties and microstructure of gold fluorocarbon-polymer composite films
- J. Perrin
- B. Despax
- et al.
- 1985
- Physical Review B
Spatially resolved optical emission studies of fluorocarbon RF plasma through the use of UV-transmitting optical fibers
- G.S. Selwyn
- E. Kay
- 1985
- Plasma Chemistry and Plasma Processing
Summary Abstract: Plasma potentials of 13.56 MHz rf argon glow discharges in a planar system
- K. Kehler
- J.W. Coburn
- et al.
- 1985
- JVSTA
Summary Abstract: Microstructure and electrical conductivity of plasma deposited gold/fluorocarbon composite films
- J. Perrin
- B. Despax
- et al.
- 1985
- JVSTA
Effect of ion bombardment during deposition on the x-ray microstructure of thin silver films
- T.C. Huang
- G. Lim
- et al.
- 1985
- JVSTA