Filtered arc deposition of amorphous diamond
- Richard Lossy
- David L. Pappas
- et al.
- 1992
- Applied Physics Letters
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108 results for J.J. Cuomo
Highly reflective x-ray mirror
- Philip Catania
- James P. Doyle
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Energetic carbon deposition at oblique angles
- John Bruley
- David L. Pappas
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Sputter deposition of dense diamond-like carbon films at low temperature
- Jerome J. Cuomo
- James P. Doyle
- et al.
- 1991
- Applied Physics Letters
Vapor deposition processes for amorphous carbon films with sp3 fractions approaching diamond
- Jerome J. Cuomo
- David L. Pappas
- et al.
- 1991
- Journal of Applied Physics
Reaction of niobium with diamond films
- C.R. Guarnieri
- F.M. d'Heurle
- et al.
- 1991
- Applied Surface Science
Compositional changes during magnetron sputtering of alloys
- S.M. Rossnagel
- I. Yang
- et al.
- 1991
- Thin Solid Films
Collimated magnetron sputter deposition
- S.M. Rossnagel
- D.J. Mikalsen
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ion-beam sputtered diamond-like carbon with densities of 2.9 g/cc
- Jerome J. Cuomo
- John Bruley
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Light scattering properties of x-ray lithography mask substrates
- J.R. Maldonado
- Y. Vladimirsky
- et al.
- 1991
- Microelectronic Engineering