Scanning x-ray microscope with 75-nm resolution
- H. Rarback
- D. Shu
- et al.
- 1988
- Review of Scientific Instruments
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14 results for T.H.P. Chang
Zone plate lenses for X-ray microscopy
- Y. Vladimirsky
- D. Kern
- et al.
- 1988
- Nuclear Inst. and Methods in Physics Research, A
1 μm MOSFET VLSI Technology: Part VI—Electron-Beam Lithography
- Warren D. Grobman
- Hans E. Luhn
- et al.
- 1979
- IEEE T-ED
Instrumentation for electron beam lithography
- T.H.P. Chang
- 1974
- IEEE Transactions on Magnetics