1 μm MOSFET VLSI Technology: Part VI—Electron-Beam Lithography
- Warren D. Grobman
- Hans E. Luhn
- et al.
- 1979
- IEEE T-ED
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14 results for T.H.P. Chang
1 µm MOSFET VLSI Technology: Part VI― Electron-Beam Lithography
- Warren D. Grobman
- Hans E. Luhn
- et al.
- 1979
- IEEE JSSC
Instrumentation for electron beam lithography
- T.H.P. Chang
- 1974
- IEEE Transactions on Magnetics
An experimental high-density memory array fabricated with electron beam
- H.N. Yu
- R.H. Dennard
- et al.
- 1973
- ISSCC 1973