Tungsten-rhenium alloys as diffusion barriers between aluminum and silicon
- S.-E. Hörnström
- T. Lin
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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122 results for J.M.E. Harper
Relationship between substrate bias and microstructure in magnetron-sputtered AlCu films
- T. Lin
- K.Y. Ahn
- et al.
- 1987
- Thin Solid Films
Summary abstract: Theory of thin-film orientation by ion bombardment during deposition
- R. Mark Bradley
- James M.E. Harper
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Theory of thin-film orientation by ion bombardment during deposition
- R. Mark Bradley
- James M. E. Harper
- et al.
- 1986
- Journal of Applied Physics
Control of thin film orientation by glancing angle on bombardment during growth
- Lock See Yu
- James M.E Harper
- et al.
- 1986
- JVSTA
Synthesis of compound thin films by dual ion beam deposition. I. Experimental approach
- J.M.E. Harper
- J.J. Cuomo
- et al.
- 1985
- Journal of Applied Physics
Synthesis of compound thin films by dual ion beam deposition. II. Properties of aluminum-nitrogen films
- H.T.G. Hentzell
- J.M.E. Harper
- et al.
- 1985
- Journal of Applied Physics
Zr1-xMoxN as a high-Tc superconductor
- K. Schwarz
- D.S. Yee
- et al.
- 1985
- Physical Review B
Alignment of thin films by glancing angle ion bombardment during deposition
- Lock See Yu
- James M. E. Harper
- et al.
- 1985
- Applied Physics Letters
Highly selective argon-oxygen ion beam etching process for Pb alloys
- D.F. Moore
- H.P. Dietrich
- et al.
- 1985
- JVSTA