Texture formation in Ti-Ta alloy disilicide thin films
- A.S. Özcan
- K.F. Ludwig Jr.
- et al.
- 2002
- Journal of Applied Physics
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122 results for J.M.E. Harper
Nucleation and growth kinetics of preferred C54 TiSi 2 orientations: Time-resolved x-ray diffraction measurements
- A.S. Özcan
- K.F. Ludwig Jr.
- et al.
- 2002
- Journal of Applied Physics
Texture of TiSi 2 thin films on Si (001)
- A.S. Özcan
- K.F. Ludwig Jr.
- et al.
- 2002
- Journal of Applied Physics
Picosecond ultrasonics study of the vibrational modes of a nanostructure
- G. Andrew Antonelli
- Humphrey J. Maris
- et al.
- 2002
- Journal of Applied Physics
Effects of alloying elements on cobalt silicide formation
- C. Lavoie
- C. Cabral Jr.
- et al.
- 2002
- Journal of Electronic Materials
In situ resistivity study of copper-cobalt films: Precipitation, dissolution and phase transformation
- S.-L. Zhang
- J.M.E. Harper
- et al.
- 2001
- Thin Solid Films
Formation of c54 tisi2: Effects of niobium additions on the apparent activation energy
- F.M. D’Heurle
- S.-L. Zhang
- et al.
- 2001
- Journal of Applied Physics
The use of in situ X-ray diffraction, optical scattering and resistance analysis techniques for evaluation of copper diffusion barriers in blanket films and damascene structures
- C. Cabral Jr.
- C. Lavoie
- et al.
- 2001
- Thin Solid Films
Two-step codeposition process for enhanced C54-TiSi2 formation in the Ti-Si binary system
- A. Quintero
- M. Libera
- et al.
- 2001
- Journal of Applied Physics
High conductivity copper-boron alloys obtained by low temperature annealing
- S.-L. Zhang
- J.M.E. Harper
- et al.
- 2001
- Journal of Electronic Materials