Surface modification of low CTE polyimide
- K.-W. Lee
- S.P. Kowalczyk
- et al.
- 1991
- ANTEC Annual Technical Conference 1991
Publications
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46 results for Jane M. Shaw
Polyimide surface chemistry
- K.-W. Lee
- S.P. Kowalczyk
- et al.
- 1989
- ACS PMSE 1989
Polyimide surface chemistry
- K.-W. Lee
- S.P. Kowalczyk
- et al.
- 1989
- ACS National Meeting 1989
Conducting polymers: applications in lithography
- Marie Angelopoulos
- J.M. Shaw
- 1989
- International SAMPE Technical Conference 1989
Chemistry of hexamethylcyclotrisilazane (HMCTS) silylation
- K.J. Stewart
- J.M. Shaw
- et al.
- 1989
- Symposium on Patterning Science and Technology 1989
Synthesis and properties of polyimides containing fluorinated aromatic amines
- G. Hougham
- J.M. Shaw
- et al.
- 1988
- International Conference on Polyimides 1988
Epoxy resins for deep UV lithography
- K.J. Stewart
- M. Hatzakis
- et al.
- 1988
- SPE Regional Technical Conference 1988
Multilayer resist systems using polysiloxanes as etch masks
- J. Paraszczak
- J.M. Shaw
- et al.
- 1983
- Microlithography 1983
Developer Temperature Effects on E-Beam and Optically Exposed Positive Photoresist
- J.M. Shaw
- M. Hatzakis
- 2019
- JES
Conducting polymers as lithographic materials
- Marie Angelopoulos
- Jane M. Shaw
- et al.
- 2004
- Polymer Engineering & Science