Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Electroluminescence and Photoluminescence from Microporous Silicon p-n Junctions
- - V.P. Kesan
  - E. Bassous
  - et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Trapping and Behavior of Particulates in a Radio Frequency Magnetron Plasma Etching Tool
- - Edward F. Patterson
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Differential method for measuring coverage-dependent adsorption probabilities
- - John G. Wilman
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Photoreflectance study of the surface Fermi level at (001) n- and p-type GaAs surfaces
- - X. Yin
  - H.-M. Chen
  - et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Highly reflective x-ray mirror
- - Philip Catania
  - James P. Doyle
  - et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Characterization of a radio frequency plasma source for molecular beam epitaxial growth of high-7_c superconductor films
- - Jean-Pierre Locciuet
  - Erich Mächler
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Energetic carbon deposition at oblique angles
- - John Bruley
  - David L. Pappas
  - et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Etching of silicon in low-pressure plasmas containing fluorine and oxygen: A comparison of real-time and postplasma surface studies
- - Gottlieb S. Oehrlein
  - Gerrit M.W. Kroesen
  - et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Temperature distribution in an ideal azimuthally symmetric chemicalvapor-deposition reactor
- - David E. Kotecki
  - Richard A. Conti
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Study particle emission in vacuum from film deposits
- - Joseph S. Logan
  - James J. McGill
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films