SEM/EBIC characterization of degradation at mirrors of GaAs/AlGaAs laser diodes
- Abram Jakubowicz
- Albert Oosenbrug
- 1994
- Microelectronic Engineering
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221 results at Microelectronic Engineering
Using simulation to analyze integrated tool performance in semiconductor manufacturing
- John Mauer
- Roland Schelasin
- 1994
- Microelectronic Engineering
Improved underlayers for acid amplified resists
- H.S. Sachdev
- R.W. Kwong
- et al.
- 1994
- Microelectronic Engineering
Lateral down-scaling of selective area MOVPE-grown GaInAs/InP wires and dots
- H. Rothuizen
- P. Roentgen
- et al.
- 1993
- Microelectronic Engineering
Comparison of the sidewall recombination in dry and wet etched InGaAs/InP wires
- B. Jacobs
- H. Zull
- et al.
- 1993
- Microelectronic Engineering
Photolithography overview for 64 megabit production
- T. Leslie
- W. Arden
- et al.
- 1993
- Microelectronic Engineering
Fabrication and characterization of compact 100nm scale metal oxide semiconductor field effect transistors
- C. Reeves
- S.J. Wind
- et al.
- 1993
- Microelectronic Engineering
Early operating experience with the helios compact synchrotron x-ray source
- D.E. Andrews
- Chas N. Archie
- 1993
- Microelectronic Engineering
"Laser cleaning" removes particles from surfaces
- W. Zapka
- Winfrid Ziemlich
- et al.
- 1993
- Microelectronic Engineering
Microscopic mechanisms of interface state generation by electrical stress
- 1993
- Microelectronic Engineering