Publications

168 results at Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Electron-beam microcolumns for lithography and related applications
- - T.H.P. Chang
  - M.G.R. Thomson
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Study of interface abruptness of molecular beam epitaxial GaAs/AlAs superlattices grown on GaAs (311) and (100) substrates
- - Y. Hsu
  - W.I. Wang
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Stressing and high field transport studies on device-grade SiO₂ by ballistic electron emission spectroscopy
- - R. Ludeke
  - H.J. Wen
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Studying membranes with scanning force microscopy and patch-clamp technique
- - J. Mosbacher
  - W. Häberle
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors
- - N. Blanc
  - J. Brugger
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Correlation of UVIIHS resist chemistry to dissolution rate measurements
- - J. Thackeray
  - T.H. Fedynyshyn
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Design and performance analysis of a three-dimensional sample translation device used in ultrahigh vacuum scanned probe microscopy
- - R.R. Schlittler
  - J.K. Gimzewski
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Cu metallization using a permanent magnet electron cyclotron resonance microwave plasma/sputtering hybrid system
- - S.M. Gorbatkin
  - D.B. Poker
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Fabrication of x-ray lithography masks with optical lithography
- - D. LaTulipe
  - J.R. Maldonado
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Liner conformality in ionized magnetron sputter metal deposition processes
- - S. Hamaguchi
  - S.M. Rossnagel
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures