Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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168 results at Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Study of interface abruptness of molecular beam epitaxial GaAs/AlAs superlattices grown on GaAs (311) and (100) substrates
- - Y. Hsu
  - W.I. Wang
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Stressing and high field transport studies on device-grade SiO₂ by ballistic electron emission spectroscopy
- - R. Ludeke
  - H.J. Wen
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
High resolution electron beam lithography using ZEP-520 and KRS resists at low voltage
- - D.M. Tanenbaum
  - C.W. Lo
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Correlation of UVIIHS resist chemistry to dissolution rate measurements
- - J. Thackeray
  - T.H. Fedynyshyn
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
In-line holography using low-energy electrons and photons: applications for manipulation on a nanometer scale
- - H. Schmid
  - Hans-Werner Fink
  - et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Lithography and fabrication processes for sub-100 nm scale complementary metal-oxide semiconductor
- - S.J. Wind
  - Y. Taur
  - et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Diazoquinone positive photoresist for x-ray lithography
- - A. Aviram
  - Daniel Bucca
  - et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Thick film positive photoresist: development and resolution enhancement technique
- - D.R. McKean
  - T.P. Russell
  - et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
High resolution x-ray mask repair
- - P.G. Blauner
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Micromachining applications of a high resolution ultrathick photoresist
- - K.Y. Lee
  - N. LaBianca
  - et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures