Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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357 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

X-ray photoelectron spectroscopy of oxygen adsorbates on Al(111): Theory experiment
- - P.S. Baqus
  - F. Parmiqiani
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Two-dimensional imaging of photofragments and species desorbed from surfaces: Energy and angle resolved studies
- - T.J. Chuang
  - R. Schwarzwald
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Rastered laser light scattering studies during plasma processing: Particle contamination trapping phenomena
- - Gary S. Selwyn
  - J. Heidenreich
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Stress and thermal expansion of boron-doped silicon membranes on silicon substrates
- - B.S. Berry
  - W.C. Pritchet
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Alkali metal chains on the GaAs(110) surface
- - Inder P. Batra
  - C.Y. Fong
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Gaas surface oxidation and deoxidation using electron cyclotron resonance oxygen and hydrogen plasmas
- - D.V. Podlesnik
  - M.T. Schmidt
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Studies of the reactive ion etching of SiGe alloys
- - G.S. Oehriein
  - G.M.W. Kroesen
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Studies of adhesion of metal films to polyimide
- - David L. Pappas
  - Jerome J. Cuomo
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Cracking and delamination of coatings
- - Sinjiroo Thouless
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ballistic electron emission spectroscopy of noble metai-gap(110) interfaces
- - R. Ludeke
  - M. Prietsch
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films