Toward controlled resist line edge roughness: Material origin of line edge roughness in chemically amplified positive-tone resists
- Q. Lin
- R. Sooriyakumaran
- et al.
- 2000
- Microlithography 2000
Publications
3561 results for Mathematical Sciences
Patterning of highly conducting polyaniline films
- T. Graham
- A. Afzali
- et al.
- 2000
- Microlithography 2000
193 nm positive tone bilayer resist based on norbornene-maleic anhydride copolymers
- R. Sooriyakumaran
- D. Fenzel-Alexander
- et al.
- 2000
- Microlithography 2000
Effect of resist components on image spreading during postexposure bake of chemically amplified resists
- W.D. Hinsberg
- F.A. Houle
- et al.
- 2000
- Microlithography 2000
Synthesis and lithographic performance of poly-4-hydroxyphenyl ethyl methacrylate based negative resists
- J. Gelorme
- L.L. Kosbar
- et al.
- 2000
- Microlithography 2000
JDAPI: A PACS archive/viewer inter-operability based on Java and DICOM
- Uri Shani
- 2000
- SPIE Medical Imaging 2000
Phased development of a Web-based PACS viewer
- Yoad Gidron
- Uri Shani
- et al.
- 2000
- SPIE Medical Imaging 2000
PACS viewer inter-operability for teleconsultation based on DICOM
- E. Salant
- Uri Shani
- 2000
- SPIE Medical Imaging 2000
Framework for efficient processing of content-based fuzzy Cartesian queries
- C.-S. Li
- Y.-C. Chang
- et al.
- 2000
- IS&T/SPIE Electronic Imaging 2000
Combining fast search and learning for fast similarity search
- Hooman Vassef
- C.-S. Li
- et al.
- 2000
- IS&T/SPIE Electronic Imaging 2000