Chromium chromate as an inert marker in copper oxidation
- Robert J. Day
- Margaret A. Frisch
- 2004
- Surface and Interface Analysis
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19 results at Surface and Interface Analysis
Voltage contrast XPS—a novel scheme for spatially resolved XPS studies
- John J. Boland
- 2004
- Surface and Interface Analysis
Adhesion of copper and chromium films to polyimide studied by static SIMS of the interface
- W.J. van Ooij
- R.H.G. Brinkhuis
- et al.
- 2004
- Surface and Interface Analysis
Interfacial reactions between Al and RuO2, MoOx and WNx diffusion barriers on Si
- S.-E. Hörnström
- A. Charai
- et al.
- 2004
- Surface and Interface Analysis
Study of near‐surface disorder and surface residues after reactive Ion etching of Silicon
- G.S. Oehrlein
- G.J. Coyle
- et al.
- 2004
- Surface and Interface Analysis
On the role of Gibbsian segregation in causing preferential sputtering
- Roger Kelly
- 2004
- Surface and Interface Analysis
ToF-SIMS studies of nanoporous PMSSQ materials: Kinetics and reactions in the processing of low-K dielectrics for ULSI applications
- P. Lazzeri
- G.W. Rubloff
- et al.
- 2004
- Surface and Interface Analysis
Surface potential studies of self-assembling monolayers using Kelvin probe force microscopy
- J. Lü
- L. Eng
- et al.
- 1999
- Surface and Interface Analysis
Conservative and dissipative interactions in dynamic force microscopy
- U. Dürig
- 1999
- Surface and Interface Analysis