Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Determination of the local electronic structure of atomic-sized defects on Si(001) by tunneling spectroscopy
- - R.J. Hamers
  - U.K. Köhler
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Mechanisms for success or failure of diffusion barriers between aluminum and silicon
- - J.M.E. Harper
  - S.E. Harnstram
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Microstructure and properties of dual ion beam sputtered tungsten film
- - A.S. Kao
  - V. Novotny
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
High-rate reactive sputter deposition of aluminum oxide
- - Fletcher Jones
  - Joseph Logan
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The angular dependence of preferential sputtering and composition in aluminum-copper thin films
- - P. Rudeck
  - J.M.E. Harper
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Gas/surface reactions in the chemical vapor deposition of tungsten using WF6/SiH4mixtures
- - Ming L. Yu
  - Benjamin N. Eldridge
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Scanning tunneling microscopy study of low-temperature epitaxial growth of silicon on sI(111 )-(7×7)
- - U.K. Köhler
  - J.E. Demuth
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Mixed-metal-oxide planar optical waveguides
- - G. Arjavalingam
  - Michael A. Russak
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Molecular-beam studies of the precursor-mediated dissociative chemisorption of N2 on W(100)
- - C.T. Rettner
  - E. Schweizer
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A study of voids in sputtered Si02
- - Mitchell J. Hait
  - Harris C. Jones
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films