Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Roughness and porosity characterization of carbon and magnetic films through adsorption isotherm measurements
- - C.L. Wang
  - M.F. Toney
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Optical emission in magnetrons: Nonlinear aspects
- - S.M. Rossnagel
  - K.L. Saenger
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Structure of the Si(111)/CaF2 interface
- - R.M. Tromp
  - M.C. Reuter
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Microstructure and properties of dual ion beam sputtered tungsten film
- - A.S. Kao
  - V. Novotny
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Gas/surface reactions in the chemical vapor deposition of tungsten using WF6/SiH4mixtures
- - Ming L. Yu
  - Benjamin N. Eldridge
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Scanning tunneling microscopy study of low-temperature epitaxial growth of silicon on sI(111 )-(7×7)
- - U.K. Köhler
  - J.E. Demuth
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reactive magnetron sputtered zirconium oxide and zirconium silicon oxide thin films
- - Michael A. Russak
  - Christopher V. Jahnes
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The chemical interaction of Mn with the MoS2(0001) surface studied by high-resolution photoelectron spectroscopy
- - Jeffrey R. Lince
  - Thomas B. Stewart
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Competitive reactions of fluorine and oxygen with W, WSi2, and Si surfaces in reactive ion etching using CF4/O2
- - Gottlieb S. Oehrlein
  - J. Lennart Lindsöm
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface analysis of realistic semiconductor microstructures
- - Gottlieb S. Oehrlein
  - Kevin K. Chan
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films