Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

In situ laser diagnostic studies of plasma-generated particulate contamination
- - G.S. Selwyn
  - J. Singh
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Plasma characterization for a divergent field electron cyclotron resonance source
- - John Forster
  - William Holber
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Plasma characterization of an electron cyclotron resonance-radio-frequency hybrid plasma reactor
- - Young H. Lee
  - John E. Heidenreich
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A He and Ne diffraction study of the W(100) phase transition
- - E. Schweizer
  - C.T. Rettner
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Optical emission characterization of a divergent magnetic field electron cyclotron resonance source
- - John S. McKillop
  - John C. Forster
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The chemical interaction of Mn with the MoS2(0001) surface studied by high-resolution photoelectron spectroscopy
- - Jeffrey R. Lince
  - Thomas B. Stewart
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Competitive reactions of fluorine and oxygen with W, WSi2, and Si surfaces in reactive ion etching using CF4/O2
- - Gottlieb S. Oehrlein
  - J. Lennart Lindsöm
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Optical emission in magnetrons: Nonlinear aspects
- - S.M. Rossnagel
  - K.L. Saenger
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface analysis of realistic semiconductor microstructures
- - Gottlieb S. Oehrlein
  - Kevin K. Chan
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Determination of the local electronic structure of atomic-sized defects on Si(001) by tunneling spectroscopy
- - R.J. Hamers
  - U.K. Köhler
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films