Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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310 results at Thin Solid Films

Theory of plasma chemical transport etching of gold in a chlorine plasma
- - C.B. Zarowin
- 1981
- Thin Solid Films
Plasma oxidation of silicon
- - A. Ray
- 1981
- Thin Solid Films
Germanide formation by thermal treatment of platinum films deposited on single-crystal Ge〈100〉 substrates
- - M.G. Grimaldi
  - L. Wieluński
  - et al.
- 1981
- Thin Solid Films
Metal-containing fluoropolymer films produced by simultaneous plasma etching and polymerization: The series of perfluoroalkanes _nF_2n+2 (n = 1,2,3,4)
- - E. Kay
  - A. Dilks
- 1981
- Thin Solid Films
Thermal strain in lead thin films VI: Effects of oxygen doping
- - Masanori Murakami
- 1980
- Thin Solid Films
High resolution X-ray diffraction from small numbers of Langmuir-Blodgett layers of manganese stearate
- - M. Pomerantz
  - Armin Segmüller
- 1980
- Thin Solid Films
Materials analysis of thin film transistors
- - B.D. Chase
  - G.C.S. Collins
  - et al.
- 1980
- Thin Solid Films
Thermal reactions between aluminum and palladium layered films
- - U. Köster
  - P.S. Ho
  - et al.
- 1980
- Thin Solid Films
Thermal strain in lead thin films V: Strain relaxation above room temperature
- - M. Murakami
  - T.S. Kuan
- 1980
- Thin Solid Films
Diffusion processes in thin films
- - D. Gupta
  - P.S. Ho
- 1980
- Thin Solid Films