Conducting Transition Metal Oxides: Possibilities for RuO2in VLSI Metallization
- L. Krusin-Elbaum
- M. Wittmer
- 2019
- JES
Publications
Date
Featured collections
Popular topics
509 results at JES
Novel Polymeric Dissolution Inhibitor for the Design of Sensitive, Dry Etch Resistant, Base-Developable Resist
- Hiroshi Ito
- Elizabeth Flores
- et al.
- 2019
- JES
Repassivation transients measured with thin film breaking electrodes
- G.S. Frankel
- B. Rush
- et al.
- 2019
- JES
Electroactive properties of polyaromatic molecules
- Joachim Bargon
- A. Diaz
- 2019
- JES
Feature-Size Dependence of Etch Rate in Reactive Ion Etching
- Young H. Lee
- Zhen H. Zhou
- 2019
- JES
Mechanisms of Electroless Metal Plating: I. Application of the Mixed Potential Theory
- Perminder Bindra
- Judith Tweedie
- 2019
- JES
Epitaxial Growth and Selectivity of AlxGa1-xAs Using Novel Metalorganic Precursors
- M.S. Goorsky
- T.F. Kuech
- et al.
- 2019
- JES
Electro-oxidation of some soluble alkyl and aryl substituted polysilane homopolymers
- A. Diaz
- M. Baier
- et al.
- 2019
- JES
Hollow Cathode Etching of Si and SiO2 Using CF4 and H2
- G. Fortuño-Wiltshire
- G.S. Oehrlein
- 2019
- JES
Investigation of Reactive-Ion-Etching-Related Fluorocarbon Film Deposition onto Silicon and a New Method for Surface Residue Removal
- G.S. Oehrlein
- J.G. Clabes
- et al.
- 2019
- JES