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168 results at Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Effects of film reoxidation on the growth and material properties of ultrathin dielectrics grown by rapid thermal nitridation in ammonia
- - C. D'Emic
  - J.S. Newbury
  - et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Metal-containing release layers for use with UV-cure nanoimprint lithographic template materials
- - F.A. Houle
  - S. Raoux
  - et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Studies of fluorocarbon film deposition and its correlation with etched trench sidewall angle by employing a gap structure using C₄F ₈Ar and CF₄/H₂ based capacitively coupled plasmas
- - Li Ling
  - X. Hua
  - et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Measurements of acid generation by extreme ultraviolet irradiation in lithographic films
- - Martin Glodde
  - Dario L. Goldfarb
  - et al.
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Are extreme ultraviolet resists ready for the 32 nm node?
- - Karen Petrillo
  - Yayi Wei
  - et al.
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Adaptive wiring for 20 nm scale epitaxial silicon Ohmic contacts to silicon nanowires
- - M.J. Rooks
  - G.M. Cohen
  - et al.
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Creation of sub-20-nm contact using diblock copolymer on a 300 mm wafer for complementary metal oxide semiconductor applications
- - Wai-Kin Li
  - Sam Yang
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Effects of pore morphology on the diffusive properties of a porous low- κ dielectric
- - E. Joseph
  - S.P. Sant
  - et al.
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Adhesion between template materials and UV-cured nanoimprint resists
- - F.A. Houle
  - Eric Guyer
  - et al.
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Local characterization of vapor-deposited electrode edges in thin film organic electronic devices
- - S. Sills
  - K. Unal
  - et al.
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures