Resolution and Linewidth Tolerances in Electron Beam and Optical Projection Lithography
- Tung Symon Chang
- David F. Kyser
- et al.
- 1981
- IEEE T-ED
Publications
465 results at IEEE T-ED
RD3D 〈Computer Simulation of Resist Development in Three Dimensions〉
- Fletcher Jones
- Jurij Paraszczak
- 1981
- IEEE T-ED
I-2 Shallow Silicide Contact for Shallow Junction Devices
- K.N. Tu
- 1981
- IEEE T-ED
Resolution, Overlay, and Field Size for Lithography Systems
- Alec N. Broers
- 1981
- IEEE T-ED
Mesostructure Electronics
- Peter J. Price
- 1981
- IEEE T-ED
Dual-Electron-Injector-Structure Electrically Alterable Read-Only-Memory Modeling Studies
- D.J. Dimaria
- David W. Dong
- et al.
- 1981
- IEEE T-ED
IVA-6 Characteristics of AuGeNi Ohmic Contacts to GaAs
- M. Heiblum
- M.I. Nathan
- et al.
- 1981
- IEEE T-ED
Self-Aligned Bipolar Transistors for High-Performance and Low-Power-Delay VLSI
- Tak H. Ning
- Randall D. Isaac
- et al.
- 1981
- IEEE T-ED
VA-5 GaAs Lossy Gate Dielectric FET
- T.L. Andrade
- N. Braslau
- 1981
- IEEE T-ED
A Device Model for Buried-Channel CCD's and MOSFET's with Gaussian Impurity Profiles
- Pallab K. Chatterjee
- Geoffrey W. Taylor
- et al.
- 1980
- IEEE T-ED