K.N. Tu, N.C. Yeh, et al.
Physical Review B
Paper
I-2 Shallow Silicide Contact for Shallow Junction Devices
Abstract
No abstract available.
Related
K.N. Tu, J.F. Ziegler, et al.
Applied Physics Letters
Conference paper
SILICIDE CONTACT AND GATE IN MICROELECTRONIC DEVICES.
K.N. Tu
International Symposium on Methods and Materials in Microelectronic Technology 1982
K.N. Tu, W.N. Hammer, et al.
Journal of Applied Physics