PaperEffect of substrate temperature on the formation of shallow silicide contacts on Si using Pd-W and Pt-W alloysM. Eizenberg, G. Ottaviani, et al.Applied Physics Letters
PaperMorphology and kinetics of crystallization of amorphous V75Si25 thin-alloy filmsF. Nava, B.Z. Weiss, et al.Journal of Applied Physics
PaperEvaluation of glancing angle X-ray diffraction and MeV 4He backscattering analyses of silicide formationS.S. Lau, W.K. Chu, et al.Thin Solid Films
