Effects of Au film on the kinetics of platinum silicide formation
- Jerng-Sik Song
- Chin-An Chang
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
X-ray photoelectron and infrared spectroscopy of microwave plasma etched polyimide surfaces
- N.J. Chou
- J. Paraszczak
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: The low-temperature reactivity of Si(100) with NH3 and NO: Rate determining steps and rate enhancement via electronic excitations
- F. Bozso
- Ph. Avouris
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Radio frequency sputter deposition of si02 films at high rate
- J.S. Logar
- F. Jones
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Charge transport in magnetrons
- S.M. Rossnagel
- H.R. Kaufman
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Imaging electronic surface states in real space on the Si(111) 2x1 surface
- Joseph A Stroscio
- R.M. Feenstra
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Inverse photoemission study of the Si(100)-(2x 1) K surface
- Inder P. Batra
- J.M. Nicholls
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract’ Integrated system for studies of thln-film chemical growth processes on silicon wafers
- M. Liehr
- S. Gates
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Glass and metal thin-film Interlayers for low-temperature field assisted bonding
- W.-Y. Lee
- F.O. Sequeda
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: On the quantitative aspects of oxygen enhancement in secondary ion mass spectrometry
- Ming L. Yu
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films