Metal induced crystallization of amorphous silicon
- P.A. Psaras
- L. Hultman
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: Theory of thin-film orientation by ion bombardment during deposition
- R. Mark Bradley
- James M.E. Harper
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Electronically excited photodissociation and desorption of molecules on surfaces
- T.J. Chuang
- K. Domen
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A comparison of the interaction of CO, N2, and OC with Cu(100)
- W. Muller
- P.S. Bagus
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Kinetics of high-temperature thermal decomposition of Si0 2 on Si(100)
- M. Liehr
- J.E. Lewis
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reactive ion etching related Si surface residues and subsurface damage: Their relationship to fundamental etching mechanisms
- Gottiieb S. Oehrlein
- Young H. Lee
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: On the quantitative aspects of oxygen enhancement in secondary ion mass spectrometry
- Ming L. Yu
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Glass and metal thin-film Interlayers for low-temperature field assisted bonding
- W.-Y. Lee
- F.O. Sequeda
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Photoemission study of Cd loss and its effect on the electronic structure of etched Hg1-xCdxTe surfaces
- G.P. Carey
- A.K. Wahi
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effect of energetic neutralized noble gas ions on the structure of ion beam sputtered thin metal films
- E. Kay
- F. Parmigiani
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films