Reactive ion etching related Si surface residues and subsurface damage: Their relationship to fundamental etching mechanisms
- Gottiieb S. Oehrlein
- Young H. Lee
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface characterization of clean polyimide films by high-resolution electron energy-loss spectroscopy
- T.C. Clarke
- C. Gregoire
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effects of Au film on the kinetics of platinum silicide formation
- Jerng-Sik Song
- Chin-An Chang
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Electrical properties of vacuum annealed Si surfaces
- J. Werner
- M. Renier
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Interaction of Ti with fused silica and sapphire during metallization
- Y.S. Chaug
- N.J. Chou
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: The interaction of no with a metal surface: N0/cu(100)
- P.H. Avouris
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract’ Integrated system for studies of thln-film chemical growth processes on silicon wafers
- M. Liehr
- S. Gates
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: Time-resolved study of oxygen reaction on si(100) surfaces using pulsed molecular beam reactive scattering
- Ming L. Yu
- Benjamin N. Eldridge
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Photoemission study of Cd loss and its effect on the electronic structure of etched Hg1-xCdxTe surfaces
- G.P. Carey
- A.K. Wahi
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Adhesion of titanium thin film to oxide substrates
- Y.H. Kim
- Y.S. Chaug
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films