Publications

465 results at IEEE T-ED

Electron-Beam Resist Edge Profile Simulation
- - David F. Kyser
  - Chiu H. Ting
- 1979
- IEEE T-ED
1 μm MOSFET VLSI Technology: Part V—A Single-Level Polysilicon Technology Using Electron-Beam Lithography
- - William R. Hunter
  - Linda Ephrath
  - et al.
- 1979
- IEEE T-ED
MA-4 the Evolution of MOS Technology Toward VLSI
- - R.H. Dennard
- 1979
- IEEE T-ED
TP-B5 Beam-Induced Switching Phenomena in ZnS:Mn BL Memory Devices
- - O. Sahni
  - W.E. Howard
  - et al.
- 1978
- IEEE T-ED
Optocoupler-based extension-line circuit for electronic pabx’s
- - Hans R. Schindler
  - Peter Vettiger
- 1978
- IEEE T-ED
A review of recent experiments pertaining to hole transport in si₃n₄
- - Patrick C. Arnett
  - Zeev A. Weinberg
- 1978
- IEEE T-ED
Performance characteristics of diazo-type photoresists under e-beam and optical exposure
- - Jane M. Shaw
  - Michael Hatzakis
- 1978
- IEEE T-ED
A double-exposure technique to macroscopically control submicrometer linewidths in positive resist images
- - Burn Jeng Lin
- 1978
- IEEE T-ED
Fabrication of novel three-dimensional microstructures by the anisotropic etching of (100) and (110) silicon
- - Ernest Bassous
- 1978
- IEEE T-ED
Silicon charge electrode array for ink jet printing
- - Lawrence Kuhn
  - Ernest Bassous
  - et al.
- 1978
- IEEE T-ED