The role of energetic ion bombardment in silicon-fluorine chemistry
- J.W. Coburn
- H.F. Winters
- 1987
- Nuclear Inst. and Methods in Physics Research, B
Publications
Date
Featured collections
Popular topics
64 results at Nuclear Inst. and Methods in Physics Research, B
Laser-induced fluorescence study of laser sputtering of graphite
- R.W. Dreyfus
- Roger Kelly
- et al.
- 1987
- Nuclear Inst. and Methods in Physics Research, B
High resolution synchrotron excited soft X-ray core level spectroscopy at NSLS
- J.F. Morar
- 1987
- Nuclear Inst. and Methods in Physics Research, B
Microanalysis of fluorine using the 19F(p, α0)16O reaction
- I. Khubeis
- J.F. Ziegler
- 1987
- Nuclear Inst. and Methods in Physics Research, B
Fluorine depth analysis using Rutherford backscattering
- I. Khubeis
- J.F. Ziegler
- 1987
- Nuclear Inst. and Methods in Physics Research, B
Measurement of absolute Al concentration in AlxGa1-xAs
- D. Yan
- J. Paul Farrell
- et al.
- 1987
- Nuclear Inst. and Methods in Physics Research, B
Ion induced adhesion via interfacial compounds
- J.E.E. Baglin
- A.G. Schrott
- et al.
- 1987
- Nuclear Inst. and Methods in Physics Research, B
Ion beam induced modification of energy of adhesion for copper films on Al2O3 substrates
- D.K. Sood
- J.E.E. Baglin
- 1987
- Nuclear Inst. and Methods in Physics Research, B
Uniformity characterization of an RTP system
- Jeffrey C. Gelpey
- Paul O. Stump
- et al.
- 1987
- Nuclear Inst. and Methods in Physics Research, B
Discharge of P2+ ions in the beamline of medium current implanters
- K. Brack
- W. Euen
- et al.
- 1987
- Nuclear Inst. and Methods in Physics Research, B