All Dry Lithography Processes and Mechanistic Studies with Poly(methacrylonitrile) and Related Polymers
- H. Hiraoka
- 2019
- JES
Publications
509 results at JES
Predicting Radiation Sensitivity of Polymers
- C.G. Willson
- K. Kinoshita
- 2019
- JES
Titanium Dioxide Films to Improve Photoresist Adhesion
- John C. Marinace
- Ralph C. McGibbon
- 2019
- JES
Parameter Dependence of RIE Induced Radiation Damage in Silicon Dioxide
- L.M. Ephrarh
- D.J. Dimaria
- et al.
- 2019
- JES
Polymerization of Aromatic Silanes in RF Plasmas
- Ivan Haller
- 2019
- JES
Effects of Several Parameters on the Corrosion Rates of Al Conductors in Integrated Circuits
- Israel Lerner
- Jerome M. Eldridge
- 2019
- JES
TiO2 Antireflection Coatings by a Low Temperature Spray Process
- H.J. Hovel
- 2019
- JES
The Controlled Etching of Silicon in Catalyzed Ethylenediamine-Pyrocatechol-Water Solutions
- A. Reisman
- M. Berkenblit
- et al.
- 2019
- JES
Deposition Techniques and Heat Transfer Properties of Porous Aluminum
- V.J. Silvestri
- K.S. Sachar
- 2019
- JES
Effect of V2O3 Addition on the Thermoluminescence and Phosphorescence of Tb-Activated Garnet Phosphors
- Takeshi Takamori
- Stephen Fine
- et al.
- 2019
- JES