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Anomalous Etch Structures Using Ethylenediamine-Pyrocatechol-Water Based Etchants and Their EliminationA. ReismanM. Berkenblitet al.2019JES
Effects of Several Parameters on the Corrosion Rates of Al Conductors in Integrated CircuitsIsrael LernerJerome M. Eldridge2019JES
The Formation of SiO2 in an RF Generated Oxygen Plasma: I. The Pressure Range Below 10 mTorrA. RayA. Reisman2019JES