Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Femtosecond time-resolved photoemission of electron dynamics in surface Rydberg states
- - T. Hertel
  - E. Knoesel
  - et al.
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Atomic step distributions on annealed periodic Si(001) gratings
- - S. Tanaka
  - C.C. Limbach
  - et al.
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Insight into the dry etching of fence-free patterned platinum structures
- - K.R. Milkove
  - C.X. Wang
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Characterization of a solid fluorocarbon film on magnetic recording media
- - Tom Karis
  - George W. Tyndall
  - et al.
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Image force effects and the dielectric response of SiO₂ in electron transport across metal-oxide-semiconductor structures
- - H.J. Wen
  - R. Ludeke
  - et al.
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effect of a surface layer on the stress relaxation of thin films
- - M.D. Thouless
  - K.P. Rodbell
  - et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effects of surface oxide on the rapid thermal nitridation of Si(001)
- - M. Copel
  - R.M. Tromp
  - et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Fluorocarbon high density plasmas. VII. Investigation of selective SiO₂-to-Si₃N₄ high density plasma etch processes
- - Ying Zhang
  - Gottlieb S. Oehrlein
  - et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Study of buried interfaces by soft x-ray fluorescence spectroscopy excited by synchrotron radiation
- - D.L. Ederer
  - J.A. Carlisle
  - et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Schiff base precursor compounds for the chemical beam epitaxy of oxide thin films. I. Deposition of CuO on MgO[001] using copper (II) bis(benzoylacetone)-ethylendiimine
- - E. Fritsch
  - E. Mächler
  - et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films