Atomic layer epitaxy of silicon by dichlorosilane studied with core level spectroscopy
- J.A. Yarmoff
- D.K. Shuh
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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357 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Dynamical studies of the interaction of D2 with a Cu(111) surface
- C.T. Rettner
- D.J. Auerbach
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Preoxidation Si cleaning and its impact on metal oxide semiconductor characteristics
- S.R. Kasi
- M. Liehr
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Nucleation and growth of ultrathin Fe and Au films on Cu(100) studied by scanning tunneling microscopy
- D.D. Chambliss
- R.J. Wilson
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface analysis studies of copper chemical vapor deposition from 1,5-cyclooctadiene-copper(l)-hexafluoroacetylacetonate
- Susan L. Cohen
- Michael Liehr
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reactivity of a fluorine passivated silicon surface
- Ruud A. Haring
- Michael Liehr
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface damage threshold of Si and Si02 in electron-cyclotron-resonance plasmas
- Young H. Lee
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
C-H bond activation on metals: A quantum dynamics model of direct and precursor mediated dissociation
- A.C. Luntz
- J. Harris
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Microscopic view of scanning tunneling microscopy
- Julian Chen
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Thickness monitoring of graphene on SiC using low-energy electron diffraction
- P.J. Fisher
- Luxmi
- et al.
- 2010
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films