Publications

14336 results for Physical Sciences

Dry Etching for VLSI—A Review
- - L.M. Ephrath
- 2019
- JES
Parameter and Reactor Dependence of Selective Oxide RIE in CF₄ + H₂
- - L.M. Ephroth
  - E.J. Petrillo
- 2019
- JES
On the Nature of CVD Si-Rich SiO2 and Si3N4 Films
- - E.A. Irene
  - N.J. Chou
  - et al.
- 2019
- JES
Self-Diffusion and Na-K Exchange in βand β”-Na-Gallate Fast Ion Conductors
- - L.M. Foster
  - D.R. Campbell
  - et al.
- 2019
- JES
The Dependence of the Memory Effect in ZnS:Mn A-C Thin Film Electroluminescence on Mn Distribution
- - V. Marrello
  - A.A. Onton
- 2019
- JES
Effect of CO on the Low Temperature Diffusion of Cr and Si Through Thin Gold Films
- - Chin-An Chang
- 2019
- JES
Oxidation and Corrosion Studies of Fe1-xPdx Films
- - Wen-Yaung Lee
  - G. Scherer
  - et al.
- 2019
- JES
All Dry Lithography Processes and Mechanistic Studies with Poly(methacrylonitrile) and Related Polymers
- - H. Hiraoka
- 2019
- JES
Fabrication Processes for a Silicon Substrate Package for Integrated Gallium Arsenide Laser Arrays
- - Michael J. Brady
- 2019
- JES
Low Energy Ion Beam Etching
- - J.M.E. Harper
  - J.J. Cuomo
  - et al.
- 2019
- JES