Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Directed sputter deposition of AlCu: Film microstructure and microchemistry
- - S.M. Rossnagel
  - J. Moser
  - et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Tribochemistry at Lubricated Interfaces
- - Xiaohe Pan
  - C.S. Bhatia
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Fluorocarbon high-density plasmas. II. Silicon dioxide and silicon etching using CF₄ and CHF
- - Y. Zhana
  - D. Vender
  - et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Model of Lead Loss in Pb(Mg^xNb^1-x)O^zion Beam Sputtered Thin Films
- - J.P. Doyle
  - J.J. Cuomo
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Adhesion durability of tantalum BPDA-PDA polyimide interfaces
- - D. Neuaroschl
  - B.K. Furman
  - et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Fluorocarbon high-density plasmas. I. Fluorocarbon film deposition and etching using CF₄ and CHF₃
- - G.S. Oehrlein
  - Y. Zhang
  - et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Si(100)2-1+Sb surfaces studied with photoemission and optical spectroscopy
- - H. Bernhoff
  - D. Purdie
  - et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Role of ions in reactive ion etching
- - J.W. Coburn
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Morphology and bonding measured from boron-nitride powders and films using near-edge x-ray absorption fine structure
- - T. Sato
  - A. Chaiken
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Hot electron scattering effects in metal-semiconductor structures and their role in interface transport
- - A. Bauer
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films