Publications

509 results at JES

Influence of the Growth Conditions of Al2O3 Passivating Layers on the Corrosion of Aluminum Films in Water
- - J. Grimblot
  - J.M. Eldridge
- 2019
- JES
Titanium Dioxide Films to Improve Photoresist Adhesion
- - John C. Marinace
  - Ralph C. McGibbon
- 2019
- JES
Parameter Dependence of RIE Induced Radiation Damage in Silicon Dioxide
- - L.M. Ephrarh
  - D.J. Dimaria
  - et al.
- 2019
- JES
Effects of Several Parameters on the Corrosion Rates of Al Conductors in Integrated Circuits
- - Israel Lerner
  - Jerome M. Eldridge
- 2019
- JES
Anomalous Etch Structures Using Ethylenediamine-Pyrocatechol-Water Based Etchants and Their Elimination
- - A. Reisman
  - M. Berkenblit
  - et al.
- 2019
- JES
Interactions Between Cr and Pt Films: New Cr-Pt Phases
- - J.E.E. Baglin
  - F.M. d'Heurle
  - et al.
- 2019
- JES
Fabrication Processes for a Silicon Substrate Package for Integrated Gallium Arsenide Laser Arrays
- - Michael J. Brady
- 2019
- JES
The Controlled Etching of Silicon in Catalyzed Ethylenediamine-Pyrocatechol-Water Solutions
- - A. Reisman
  - M. Berkenblit
  - et al.
- 2019
- JES
One-Micron Polycide (WSI₂ on Poly-Si) MOSFET Technology
- - M.Y. Tsai
  - H.H. Chao
  - et al.
- 2019
- JES
On the Nature of CVD Si-Rich SiO2 and Si3N4 Films
- - E.A. Irene
  - N.J. Chou
  - et al.
- 2019
- JES