Single Crystal Silicon Films on Amorphous Insulators: Growth by Lateral Nucleated Epitaxy Using Scanning Laser and Electron Beams and Evaluation by Electron Backscattering Contrast
- T.O. Sedgwick
- R.H. Geiss
- et al.
- 2019
- JES
Publications
509 results at JES
Al Coverage of Surface Steps at SiO2 Insulated Polycrystalline Si Boundaries: Al Evaporation in Vacuum and Low Pressure Ar
- V.J. Silvestri
- V.L. Rideout
- et al.
- 2019
- JES
Effect of Lubricant Environments on Saw Damage in Si Wafers
- T.S. Kuan
- K.K. Shih
- et al.
- 2019
- JES
Effects of Oxidation on the Atmospheric Corrosion of Permalloy Films
- Wen-Yaung Lee
- G. Scherer
- et al.
- 2019
- JES
Self-Diffusion and Na-K Exchange in βand β”-Na-Gallate Fast Ion Conductors
- L.M. Foster
- D.R. Campbell
- et al.
- 2019
- JES
Selective Etching of Silicon Dioxide Using Reactive Ion Etching with CF4-H2
- L.M. Ephrath
- 2019
- JES
Deposition Techniques and Heat Transfer Properties of Porous Aluminum
- V.J. Silvestri
- K.S. Sachar
- 2019
- JES
Silicon Oxidation Studies: Measurement of the Diffusion of Oxidant in SiO2 Films
- E.A. Irene
- 2019
- JES
Preparation and Characterization of Ruthenium Dioxide Crystals
- M.W. Shafer
- R.A. Figat
- et al.
- 2019
- JES
Dry Etching for VLSI—A Review
- L.M. Ephrath
- 2019
- JES