Sung Ho Kim, Oun-Ho Park, et al.
Small
A simple u.v. curing process is described that renders micron sized images in AZ resists resistant to flow when heated to temperatures as high as 210° C. The u.v. treatment prevents the image flow problems usually encountered in reactive ion etching processes. © 1981, The Electrochemical Society, Inc. All rights reserved.
Sung Ho Kim, Oun-Ho Park, et al.
Small
Oliver Schilter, Alain Vaucher, et al.
Digital Discovery
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures