Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Si(100)2-1+Sb surfaces studied with photoemission and optical spectroscopy
- - H. Bernhoff
  - D. Purdie
  - et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Role of ions in reactive ion etching
- - J.W. Coburn
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Fluorocarbon high density plasmas. VIII. Study of the ion flux composition at the substrate in electron cyclotron resonance etching processes using fluorocarbon gases
- - Gottlieb S. Oehrlein
  - Ying Zhang
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Deposition of diamondlike carbon using a planar radio frequency induction plasma
- - D.L. Pappas
  - J. Hod wood
  - et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Modification of the PHI sample mount for multiple- or micropositioning for Zalar rotation
- - Paul Soo
  - David L. Neiman
  - et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Langmuir probe measurements of a radio frequency induction plasma
- - J. Hopwood
  - C.R. Guarnieri
  - et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Electromagnetic fields in a radio-frequency induction plasma
- - J. Hopwood
  - C.R. Guarnieri
  - et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effects of ion bombardment in plasma etching on the fluorinated silicon surface layer: Real-time and postplasma surface studies
- - Gottlieb S. Oehrlein
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Copper deposition by electron cyclotron resonance plasma
- - A. Sugerrnan
  - F.E. Turene
  - et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Molecular Dynamics Modeling of Microstructure and Stresses in Sputter-Deposited Thin Films
- - F. Jones
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films